Oxidation/diffusion processing apparatus
US5330352A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Jan 29, 1993 |
| Grant date | Jul 19, 1994 |
| Priority date | — |
| Expiry date | Jan 29, 2013 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B31/16
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An oxidation/diffusion processing apparatus includes a processing vessel, arranged such that a longitudinal direction is vertical, for storing a plurality of target objects to be processed, a heater arranged around the processing vessel, for heating the interior of the processing vessel, a process gas supply mechanism for supplying a process gas from the lower portion of the processing vessel into the processing vessel, and an exhaust mechanism for exhausting a processed exhaust gas from the upper portion of the processing vessel. The process gas is supplied to the target objects heated to a predetermined temperature by the heater to perform oxidation/diffusion processing to the target objects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.