Surface treated vestibule block and process of making the same
US5330842A · kind A · utility
Assignees
Inventor
Key dates
| Filing date | Mar 17, 1992 |
| Grant date | Jul 19, 1994 |
| Priority date | — |
| Expiry date | Mar 17, 2012 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC04B2111/00844
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A vestibule block or interior furnace wall utilized in a diffusion furnace for manufacturing semi-conductors, integrated circuits and the like, and which is made of refractory or ceramic material, is treated on its surface with a suspension of fine particulate of a glass frit composition comprising an alkali earth metal alumino silicate, and is thereafter heated above the transition temperature of the alkali earth metal alumino silicate. Vestibule blocks and interior surface walls which have been treated in the above-described manner are highly abrasion resistant on their surface, generate virtually no particulate matter under conditions of ordinary use in the semi-conductor manufacturing processes, and generate significantly less particulate matter when tested in an abrasion test against vestibule blocks of the prior art.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.