Multilayer Ti-Al-N coating for tools

US5330853A · kind A · utility

Assignee

• Leybold GmBH · DE

Inventors

• Dieter Hofmann · Augsburg, DE
• Bernd Hensel · Eschborn, DE

Key dates

• Filing date: Aug 19, 1991
• Grant date: Jul 19, 1994
• Expiry date: Aug 19, 2011

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T428/265
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Surface coating includes alternating first and second ternary layers, wherein the first layer TiAlN.sub.x has a higher nitrogen content and is considerably thinner than the second layer TiAlNy. The first layer is preferably applied by decreasing the nitrogen content of a reactive atmosphere from a maximum to a minimum during sputtering of a TiAl target. The second layer is then applied by sputtering the TiAl target over a longer period of time while the nitrogen content is maintained constant at the minimum. When a further first layer is applied, the nitrogen is again increased to the maximum.