Planar epitaxial films of SnO.sub.2
US5330855A · kind A · utility
11Cited by
6References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 23, 1991 |
| Grant date | Jul 19, 1994 |
| Priority date | — |
| Expiry date | Sep 23, 2011 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/265
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A planar epitaxial film of tin oxide has low defect density, high purity, crystalline rutile unit cell structure, one crystalline orientation, controlled stoichiometry, extended lateral dimensions, extremely smooth surface morphology, a high degree of atomic order extending to the surface of the film and is colorless and transparent. The film is made by a method which includes reactive sputter deposition. The films can be used in chemical sensors as well as in numerous other applications.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.