Patent · US Expired

Porous semiconductor light emitting device

US5331180A · kind A · utility

26Cited by
8References
26Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 28, 1993
Grant dateJul 19, 1994
Priority date
Expiry dateApr 28, 2013

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S438/962
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

An Si or SiC semiconductor layer is subjected to anodic oxidization in an HF solution to form a porous semiconductor layer. Without drying the porous semiconductor layer, it is then dipped in pure water. Ultrasonic waves applied to the pure water shorten the reaction time and help bubbles separate from the surface of the porous region. The porous semiconductor layer is used for forming a pn junction, and carriers are injected into the pn junction.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.