Vertical cavity surface emitting laser and sensor
US5331658A · kind A · utility
53Cited by
3References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 26, 1992 |
| Grant date | Jul 19, 1994 |
| Priority date | — |
| Expiry date | Aug 26, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/2063
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A vertical cavity surface emitting laser (VCSEL) having sensing capabilities is fabricated by forming a layer having the capability to change the threshold current of the VCSEL. This can be accomplished by forming a deformable membrane or a cantilevered beam on the VCSEL. The deformation of movement of the beam causes a change in the threshold current of the VCSEL, so that it can go from lasing to nonlasing or vice versa. In addition, a layer which changes reflectivity in the presence of a particular chemical can also be formed on the VCSEL to produce the same result.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.