Heating apparatus
US5332557A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 19, 1993 |
| Grant date | Jul 26, 1994 |
| Priority date | — |
| Expiry date | Jan 19, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S422/906
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A plurality of workpieces are supported on a workpiece holder disposed over an opening defined in a horizontal base plate and connected to an evacuating device. A reaction chamber, which is supported on an arm of a lifting and lowering device, is vertically movable with respect to the base plate between a lowered position in which the reaction chamber defines a closed space which accommodates the workpieces therein and a lifted position in which the workpieces are exposed out of the reaction chamber. A heating device, which is supported on an arm of another lifting and lowering device, is vertically movable with respect to the base plate between a lowered position in which the heating device surrounds the reaction chamber and a lifted position in which the reaction chamber is exposed out of the heating device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.