High performance micromachined valve orifice and seat
US5333831A · kind A · utility
61Cited by
9References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 19, 1993 |
| Grant date | Aug 2, 1994 |
| Priority date | — |
| Expiry date | Feb 19, 2013 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K2099/008
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A microminiature valve includes a crystalline substrate having a flow via and a raised valve seat structure. The valve seat structure has a planar bearing surface. The inner edge of the bearing surface defines an orifice to the flow via. The flow via has a varying cross sectional area and is narrowest at the orifice. From both the inner and outer edges of the bearing surface, parallel sloped walls along {111} planes are formed by an anisotropic etch. The microminiature valve has a high ratio of the area of the flow via at the orifice to the area within the outer edges of the valve seat structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.