Probe drive mechanism and electronic device which uses the same
US5334835A · kind A · utility
32Cited by
3References
33Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 28, 1992 |
| Grant date | Aug 2, 1994 |
| Priority date | — |
| Expiry date | Sep 28, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/947
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A probe drive mechanism includes a cantilever portion in which a piezoelectric layer is disposed between electrode layers, and a circuit portion which is positioned adjacent to the cantilever portion and drives the cantilever. The cantilever portion and the circuit portion are formed on the same substrate. A protection layer covers the circuit portion and part of the substrate, and the cantilever portion is formed on the protection layer adjacent to the circuit portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.