Microminiaturized pump
US5336062A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Oct 20, 1992 |
| Grant date | Aug 9, 1994 |
| Priority date | — |
| Expiry date | Oct 20, 2012 |
Classification
- Technology area (CPC A)Human Necessities
- CPC primaryA61M2205/0244
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
A microminiaturized pump consists of two superposed, interconnected pump bodies of semiconductor material, which each include electrically conductive regions insulated from one another. At least one of the two pump bodies has a thin, flexible diaphragm having integrated therein at least one check valve, which has an inlet aperture and a cover plate over it, the thin, flexible diaphragm including at least part of the electrically conductive region of one pump body, whereas, in relation to the surface dimensions of the thin, flexible diaphragm, the electrically conductive region of the other pump body is arranged at a short distance from the thin, flexible diaphragm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.