Method of manufacturing a chemically adsorbed film
US5338579A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 27, 1993 |
| Grant date | Aug 16, 1994 |
| Priority date | — |
| Expiry date | May 27, 2013 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y40/00
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method of manufacturing a chemically adsorbed film, which can efficiently provide a water and oil repelling and anti-contaminating ultra thin film with uniform thickness by spraying a solution comprising a chemical adsorbent on a substrate surface having active hydrogen groups in a dry atmosphere. A chemically adsorbed film can be formed by spraying a chlorosilane-based surface active agent on a substrate surface having active hydrogen groups such as hydroxyl, imino groups or the like. After forming a siloxane-based monomolecular layer or polysiloxane layer beforehand by spraying a chlorosilane compound or a solution comprising a chlorosilane compound on a substrate surface, a chemically adsorbed monomolecular or polymer layer can be formed by spraying a solution comprising a chlorosilane-based surface active agent. The film can be formed in a short time without being inhibited by the shapes and sizes of substrates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.