Process fo the production of Si.sub.2 N.sub.4 using a silicon, phosphorous and nitrogen containing precursor

US5340561A · kind A · utility

Assignee

• BAYER HEALTHCARE LLC · DE

Inventors

• Hans-Peter Baldus · Burscheid, DE
• Wolfgang Schnick · Gauting, DE

Key dates

• Filing date: Dec 20, 1993
• Grant date: Aug 23, 1994
• Expiry date: Dec 20, 2013

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C01P2002/72
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

The present invention relates to a process for the production of low-needle silicon nitride of high .alpha.-content, wherein an amorphous nitrogen-containing silane compound is mixed with a crystalline or amorphous compound comprising the elements silicon, phosphorus and nitrogen to form a mixture which is heat-treated at temperatures above 1000.degree. C. to form the low-needle silicon nitride. The present invention also relates to the silicon-, nitrogen- and phosphorus-containing compound which is used as the starting material in the process for the production of the low-needle silicon nitride, and the process for the production of the silicon-, nitrogen-and phosphorus-containing compound.