Helium leak detector
US5341671A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 23, 1992 |
| Grant date | Aug 30, 1994 |
| Priority date | — |
| Expiry date | Sep 23, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01M3/202
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A helium leak detector includes a gas analyzer and a secondary pump having at least on its discharge side a Holweck type stage. The pump is of a type enabling the suction pressure to be reduced to a value at least equal to 10.sup.-4 mbar and a discharge pressure which is sufficiently high to be compatible with the suction pressure of a dry primary pump having at least two stages. The secondary pump is connected to the low-pressure output of a sampling unit on an intermediate point of the secondary pump where the flow conditions are molecular. A sniffer probe is connected to the high-pressure side of the sampling unit. This high-pressure side is further connected to the dry primary pump between its at least two stages.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.