Method for forming amorphous ferroelectric materials
US5342648A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 23, 1992 |
| Grant date | Aug 30, 1994 |
| Priority date | — |
| Expiry date | Sep 23, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/706
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Amorphous ferroelectric materials are formed by a sol-gel type process and the ferroelectric properties stabilized by complete hydrolysis and polycondensation, and extraction of residual organic materials, preferably by heating at temperatures below the temperature at which crystallization may occur. Stable solutions of metal alkoxides are prepared by reacting or dissolving a metal alkoxide in alcohol such as absolute ethanol. The solution may be spincast on essentially any substrate, conductor or nonconductor, crystalline or amorphous, transparent or opaque, and even including plastics. Hydrolysis and polycondensation occur in situ to deposit an amorphous ferroelectric film. Residual alcohol is extracted by heating below the temperature at which crystallization occurs. Such films show P-E hysteresis loops and pyroelectric current. Such ferroelectric thin films are useable in electronic, opto-electronic and optical devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.