Selective modification of individual nanometer and subnamometer structures in the surface of a solid

US5343042A · kind A · utility

Assignee

• BASF SE

Inventors

• Harald Fuchs · Eisenberg (Pfalz), DE
• Thomas Schimmel · Karlsruhe, DE

Key dates

• Filing date: Jun 4, 1992
• Grant date: Aug 30, 1994
• Expiry date: Jun 4, 2012

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S977/861
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A process for the selective modification and reversible removal of extremely fine structures having dimensions of down to the nanometer and subnanometer range from the surface of a solid, comprises moving the fine tip of a probe, for example a surface-sensitive scanning probe, which is located at a distance in the .ANG.ngstrom range above the surface or is in contact with the surface, over the structure at essentially the same height and thus causing a change in this structure.