Temperature-controlled, micromachined arrays for chemical sensor fabrication and operation
US5345213A · kind A · utility
90Cited by
31References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 26, 1992 |
| Grant date | Sep 6, 1994 |
| Priority date | — |
| Expiry date | Oct 26, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2035/00237
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Planar forms of chemically-sensitive materials have been combined, under temperature control, with the pixels of a specially-designed micro-hotplate array to produce a miniature device capable of analyzing chemical mixtures. The device uses integrated multiple elements having different adsorption properties and temperatures to collectively achieve chemical selectivity in sensing. The method of making and using selectively in sensing. The device of the present invention is manufactured by standard CMOS foundry techniques which allow the production of a range of devices that have improved sensing performance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.