Contact probes
US5345690A · kind A · utility
23Cited by
7References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 7, 1992 |
| Grant date | Sep 13, 1994 |
| Priority date | — |
| Expiry date | Oct 7, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B7/012
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A touch trigger probe includes a hybrid integrated circuit (58). On this circuit are provided both kinematic support elements (28) for supporting a deflectable stylus (14) in a precise rest position, and sensing elements (40) for detecting contact between the stylus (14) and a workpiece. Embodiments are also disclosed in which the kinematic support elements are provided on a silicon chip, e.g. by micro-machining.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.