Process for the preparation of partially-substituted fluorosilane
US5346682A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 24, 1993 |
| Grant date | Sep 13, 1994 |
| Priority date | — |
| Expiry date | Nov 24, 2013 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01G9/04
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A process is provided by the present invention for the preparation of a partially-substituted fluorosilane represented by the following formula: SiH.sub.n F.sub.4-n wherein n stands for an integer of 1 to 3. The process comprises converting a corresponding partially-substituted chlorosilane represented by the following formula: SiH.sub.n Cl.sub.4-n wherein n has the same meaning as defined above into the partially-substituted fluorosilane by halogen replacement while using a fluorinating agent. The fluorinating agent is zinc fluoride having a water content not higher than 0.2 wt. %. Preferably, the size of crystallites in the direction of a (110) plane of the zinc fluoride is at least 500 .ANG..
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.