Polishing apparatus
US5347763A · kind A · utility
13Cited by
9References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 26, 1993 |
| Grant date | Sep 20, 1994 |
| Priority date | — |
| Expiry date | Nov 26, 2013 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B13/06
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
There is disclosed a polishing apparatus utilizing a gel material as the polishing tool, in which the gel material is rotated in the vicinity of a surface to be polished, or is given rotating and rocking motions in direct contact with the surface to be polished.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.