Structure of micro-pirani sensor
US5347869A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 25, 1993 |
| Grant date | Sep 20, 1994 |
| Priority date | — |
| Expiry date | Mar 25, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L21/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A new structure of a vacuum meter with good designs of temperature compensation and stabilization, The structure comprises a floating plate made by a micro-machining technique and a thermal sensitive element installed on the floating plate, The floating plate has a number of suspending arms extending outward to supporting the floating plate in a cavity of a semiconductor substrate for good heat isolation. The area of the floating plate and the length and width of the suspending arm has a specific ratio for an optimized sensitivity. A dummy resistor for temperature compensation is composed by a serial connection of a constant resistor with almost zero temperature coefficient and the thermal sensitive elements in a specific ratio. The vacuum meter further overlap on a temperature-controlled thermoelectric cooling device and is covered by a thermal shield so that the temperatures on and circumferential to the floating plate can be maintained stably.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.