Comb drive micromechanical tuning fork gyro
US5349855A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 7, 1992 |
| Grant date | Sep 27, 1994 |
| Priority date | — |
| Expiry date | Apr 7, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/02496
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microfabricated tuning fork rate sensitive structure and drive electronics in which vibrational forces are communicated through a set of meshing drive and driven finger electrodes associated with each of two vibrating elements. The vibrating elements are supported in a rotatable assembly between first and second support electrodes which are in turn suspended by flexures for rotation about an axis passing through the flexures and through a point midway between the vibrating elements. Additional masses are formed onto the vibrating elements to improve overall sensor sensitivity. Sense electrodes for detecting capacitive changes between the support electrodes and the sense electrodes are positioned at each end of the support electrodes. Drive electronics are connected between the driven fingers of the vibrating elements and the drive electrode fingers which mesh with them to cause vibration. Excitation is provided between the support electrodes and the sense electrodes. Any change in signal resulting from rotation of the assembly and the resulting variation in capacitance between the support electrodes and the sense electrodes is sensed as a measure of inertial rate. A torque loop m…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.