Wafer retaining platen having peripheral clamp and wafer lifting means
US5350427A · kind A · utility
13Cited by
6References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 14, 1993 |
| Grant date | Sep 27, 1994 |
| Priority date | — |
| Expiry date | Jun 14, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/247
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An apparatus for releasably holding a workpiece in semiconductor process systems such as a batch ion implanter which comprises a linkage mechanism mounted onto the backside of the platen for clamping the wafer against the fence of the supporting means and pusher means mounted on wafer lift means for engagement with the lever mechanism for locking and unlocking the device, and sensing any misclamp of the workpiece.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.