Triple-layered ceramic heater
US5350720A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 12, 1993 |
| Grant date | Sep 27, 1994 |
| Priority date | — |
| Expiry date | Apr 12, 2013 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC04B2111/00844
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
An improved double-layered ceramic heater, which is used for heating a semiconductor silicon wafer mounted thereon in the processing of semiconductor devices, is proposed to be freed from the problems in the prior art ceramic heaters in respects of service life and contamination of silicon wafers mounted thereon. Different from conventional ceramic heaters having a ceramic substrate plate of, for example, boron nitride provided with a heater element layer of a metal foil, the inventive ceramic heater has a substrate plate of silicon nitride and a heater element layer of graphite is formed thereon by the CVD method so that the ceramic heater is not responsible for contamination of semiconductor silicon by virtue of absence of any element which can be a disturbing dopant of the semiconductor. The problem of contamination with carbon can be solved by further providing a coating layer of silicon nitride by the CVD method.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.