Method of manufacturing an oxide superconductor film
US5350738A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Nov 27, 1992 |
| Grant date | Sep 27, 1994 |
| Priority date | — |
| Expiry date | Nov 27, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S505/742
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The present invention provides a method of manufacturing a high quality oxide superconductor film capable of controlling the film-forming rate and the film composition easily and forming the superconductor film safely and economically, over a wide region and homogeneously, wherein each of elements of R in which R represents one or more of elements selected from the group consisting of Y and lanthanide series rare earth elements, Ba and Cu is vapor deposited in the state of metal on a substrate under a high vacuum of lower than 10.sup.-8 Torr by a vacuum vapor deposition process to form a precursor comprising an amorphous metal and the precursor is oxidized and crystallized by applying a heat treatment without taking out the same into the atmospheric air.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.