Method and apparatus for maintaining clean articles
US5351415A · kind A · utility
117Cited by
1References
42Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 18, 1992 |
| Grant date | Oct 4, 1994 |
| Priority date | — |
| Expiry date | May 18, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67769
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A method, system and apparatus for maintaining articles to be processed clean, having an airtight transportable container with an inlet valve for admitting ionized gas and an outlet valve for venting gas, a purger with an interface to the container inlet valve and a vacuum pick-up and ionized gas spray wand is disclosed. A purger rack for storing multiple containers is also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.