Oligomeric compounds with acid-labile protective groups useful in positive-working radiation-sensitive mixture

US5354643A · kind A · utility

Assignee

• Hoechst GmbH · DE

Inventors

• Ivan Cabrera · Dreieich, DE
• Georg Pawlowski · Saitama, JP

Key dates

• Filing date: Jul 28, 1992
• Grant date: Oct 11, 1994
• Expiry date: Jul 28, 2012

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/039
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

Disclosed are compounds of the formula I ##STR1## in which X is a phenyl, [1]naphthyl or [2]naphthyl radical each substituted by at least one tert.-butoxycarbonyloxy group and, if appropriate, having one or more than one additional substituent, PA1 R.sup.1 is a hydrogen atom, a (C.sub.1 -C.sub.6)-alkyl radical, a (C.sub.6 -C.sub.10)-aryl radical or one of the radicals X and PA1 R.sup.2 is a (C.sub.4 -C.sub.12)-alkylene, (C.sub.4 -C.sub.12)-alkenylene or (C.sub.4 -C.sub.12)-alkynylene group in which, if appropriate, up to three methylene groups are replaced by bridge members having at least one hetero atom, such as --O--, --S--, --NR.sup.3 --, --CO--, --CO--O--, --CO--NH--, --O--CO--NH--, --NH--CO--NH--, --CO--NH--CO--, --SO.sub.2 --, --SO.sub.2 --O-- or --SO.sub.2 --NH--, a (C.sub.4 -C.sub.12)-cycloalkylene, (C.sub.4 -C.sub.12)-cycloalkenylene or (C.sub.8 -C.sub.16)-arylenebisalkyl radical in which, if appropriate, up to three methylene groups of the aliphatic moiety are replaced by bridge members of the above-mentioned type and which can be substituted in the aromatic moiety by fluorine, chlorine or bromine atoms or by (C.sub.1 -C.sub.4)-alkyl, (C.sub.1 -C.sub.4)-alkoxy, nitro, cy…