Patent · US Expired

Near field scanning optical and force microscope including cantilever and optical waveguide

US5354985A · kind A · utility

140Cited by
6References
34Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJun 3, 1993
Grant dateOct 11, 1994
Priority date—
Expiry dateJun 3, 2013

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S977/873
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A near field scanning optical microscope (NSOM) includes a cantilever which is aligned generally parallel to the surface of a sample. An optical waveguide extends along the cantilever to a tip which protrudes downward from the cantilever. A small aperture at the apex of the tip allows light radiation flowing through the waveguide to be directed toward the sample. The cantilever is vibrated, and variations in its resonant frequency are detected and delivered to a feedback control system to maintain a constant separation between the tip and the sample. The NSOM can also be operated as an atomic force microscope in either a contact or non-contact mode.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.