Device for supplying a multi-stage dry-running vacuum pump with inert gas
US5356275A · kind A · utility
15Cited by
8References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 1, 1993 |
| Grant date | Oct 18, 1994 |
| Priority date | — |
| Expiry date | Sep 1, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87249
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
The invention relates to a system for supplying inert gas to a multi-stage, dry-running vacuum pump (1) with systems for distributing the inert gas to the pump stages. To be able to monitor the flow of the inert gas and/or influence the rate of flow, a modularly constructed apparatus (36) with inert gas inlet, inert gas outlets and inert gas conduits is proposed, which is equipped with monitoring components.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.