X-ray mask structure
US5356686A · kind A · utility
12Cited by
3References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 14, 1994 |
| Grant date | Oct 18, 1994 |
| Priority date | — |
| Expiry date | Jan 14, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24851
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An X-ray mask structure includes a mask substrate having a pattern; a supporting frame for carrying and supporting the mask substrate; and an adhesive material for fixing the mask substrate to the supporting frame; wherein a stress releasing groove is formed in at least one of the mask substrate and the supporting frame.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.