Reticle comprising phase shifter with a tapered edge
US5356738A · kind A · utility
5Cited by
2References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 24, 1991 |
| Grant date | Oct 18, 1994 |
| Priority date | — |
| Expiry date | Dec 24, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/28
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The edge of a 180.degree. phase shifter on a glass substrate of a reticle has a tapered structure, and a reduction of the intensity of transmitted light by an interference in the boundary area between the phase shifter and the glass substrate is moderated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.