Cantilever type displacement element, and scanning tunneling microscope or information processing apparatus using same
US5357108A · kind A · utility
32Cited by
7References
36Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 9, 1992 |
| Grant date | Oct 18, 1994 |
| Priority date | — |
| Expiry date | Jun 9, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/873
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A cantilever type displacement element comprises a piezoelectric layer and at least two electrodes for applying a voltage to said piezoelectric layer, at least one of said electrodes being a comb-shaped electrode pair having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.