Solid state imaging device having high-sensitivity and low-noise characteristics by reducing electrostatic capacity of interconnection
US5357129A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Nov 24, 1993 |
| Grant date | Oct 18, 1994 |
| Priority date | — |
| Expiry date | Nov 24, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/3011
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
There is provided a solid state imaging device having high-sensitivity, low-noise characteristics by reducing electrostatic capacity relating to interconnection. The solid state imaging device includes a photoelectric conversion section, a transfer section, a floating diffusion layer for receiving signal charges from the transfer section, and an output transistor having a gate electrode connected to the floating diffusion layer via an interconnection. A source and a drain of the output transistor are provided commonly within a flat p-type well of relatively thin concentration in which the photoelectric conversion section, the transfer section, and the floating diffusion layer are also provided. It becomes possible to reduce an interconnection capacity, a gate-drain capacity, and a gate-channel capacity, to increase gain of a source follower circuit, to relax electric fields in the vicinity of the drain, and to prevent electric charges from inflow and outflow from substrate, without any increase in the fabrication process. As a result, a high-sensitivity, low-noise solid state imaging device can be offered.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.