Capacitive differential pressure sensor and method of measuring differential pressure at an oil or gas well
US5357806A · kind A · utility
14Cited by
8References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 3, 1993 |
| Grant date | Oct 25, 1994 |
| Priority date | — |
| Expiry date | May 3, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0075
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitive differential pressure sensor comprises two end pieces and a central diaphragm all of the same type of electrically non-conductive material, such as quartz. As the central diaphragm moves relative to the end pieces in response to pressures applied through the end pieces, capacitance changes are sensed through one pair of facing electrodes on one end piece and the diaphragm and another pair of facing electrodes on the other end piece and the diaphragm. A method of measuring differential pressures at an oil or gas well with such a sensor is also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.