Method and apparatus for growing diamond films
US5358596A · kind A · utility
11Cited by
4References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 2, 1992 |
| Grant date | Oct 25, 1994 |
| Priority date | — |
| Expiry date | Jul 2, 2012 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B29/04
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A supersonic, direct-current arcjet is designed for expansion into low pressure, the arcjet operates as mixtures of hydrogen and argon to convert molecular hydrogen to atomic hydrogen and direct the atomic hydrogen to a substrate surface. A hydrocarbon (methane or acetylene) is introduced in the arcjet plume where it is converted to hydrocarbon precursors and is directed to the substrate surface where it combines with the atomic hydrogen to produce a diamond film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.