Optics and environmental protection device for laser processing applications
US5359176A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 2, 1993 |
| Grant date | Oct 25, 1994 |
| Priority date | — |
| Expiry date | Apr 2, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K3/0017
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An optics and environmental protection device for laser processing applications in which a laser processing assembly including a laser beam source is used to process a substrate. The laser processing assembly includes an optical focusing assembly including at least one lens located between the laser source and the substrate for focusing the laser beam on the substrate. The optics and environmental protection device includes a housing defining a chamber located between the optical focusing assembly and the substrate. The housing includes a first opening located adjacent to the optical focusing assembly for admitting the laser beam into the chamber, a second opening located adjacent to the substrate which allows the beam to exit the chamber, a third opening adjacent to which a source of pressurized gas is located, and a fourth opening adjacent to which a vacuum source is located. Pressurized gas and a vacuum source direct smoke, vapor, particles, and other debris produced by the laser processing away from the optical focusing assembly and the substrate and toward the fourth opening in the housing. The vacuum source also removes the smoke, vapor, and particles from the chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.