High efficiency VCSEL and method of fabrication
US5359618A · kind A · utility
85Cited by
3References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 1, 1993 |
| Grant date | Oct 25, 1994 |
| Priority date | — |
| Expiry date | Jun 1, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/911
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A high efficiency vertical cavity surface emitting laser with first and second mirror stacks and an active area sandwiched therebetween. The second mirror stack is formed into a mesa with exposed end surface and outer sidewalls and a centrally located light emission region. A portion of the mesa adjacent the exposed outer sidewalls has a reduced electrical conductance so as to spread operating current from the outer sidewalls into the centrally located light emission region. The electrical conductance of the portion is reduced by oxidizing or etching the outer sidewalls.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.