Article storage house in a clean room
US5363867A · kind A · utility
62Cited by
1References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 21, 1993 |
| Grant date | Nov 15, 1994 |
| Priority date | — |
| Expiry date | Jan 21, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/14
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An article storage house in a clean room for airtightly accommodating a wafer cassette, etc. in which the wafer cassette carried in from the outside of an article carry-in/out portion is accommodated into a container by an automatic article delivery unit disposed in the article carry-in/out portion or it is carried in the article storage house while it is accommodated in the container and is stored in sections of the article storage house. An inert gas purge mechanism and an automatic container cleaning portion are disposed in the automatic article delivery unit or each section.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.