Apparatus for clean transfer of objects
US5364219A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 23, 1992 |
| Grant date | Nov 15, 1994 |
| Priority date | — |
| Expiry date | Jun 23, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/139
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A clean transfer system having a first vacuum chamber with a first transfer port, a first shutter for opening and closing the first transfer port and a first connecting member surrounding the first transfer port. The first connecting member is provided with at least an exterior portion. A second vaccum chamber includes a second transfer port, a second shutter for opening and closing the second transfer port, and a second connecting member surrounding the second transfer port. The second connecting member has at least an exterior portion. A closed space is formed between the first and second connecting members, so that the first and second shutters are movable within the closed space.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.