Plasma treatment of glass surfaces to remove carbon
US5364434A · kind A · utility
11Cited by
5References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 30, 1992 |
| Grant date | Nov 15, 1994 |
| Priority date | — |
| Expiry date | Sep 30, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S65/16
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Glass free of surface carbon deposits, such as carbon film and/or carbon occlusions, and a process for removing such carbon deposits from glass. The process is characterized by the application of a plasma to glass to remove the carbon deposits. The plasma used for this purpose contains active specie which reacts with the carbon deposits to form gaseous carbon products.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.