Probemat cleaning system using CO.sub.2 pellets
US5364472A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 21, 1993 |
| Grant date | Nov 15, 1994 |
| Priority date | — |
| Expiry date | Jul 21, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R3/00
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A system for cleaning test probes attached to a probe mat fixture by propelling CO.sub.2 pellets at the test probes, by rotating the fixture so that the pellets impact different sides of the test probes, and by providing electrostatic protection for active devices mounted on the probemat fixture. The CO.sub.2 pellets are propelled so that they strike the test probes at an angle to the horizontal plane of the test probe as mounted on the probemat fixture. Electrostatic protection is provided by connecting all electrical connections to the probemat fixture to ground and by reducing electrostatic charge build up on the probemat fixture by using an ionizer to direct ions at the probemat fixture.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.