Defect detection and defect removal apparatus of thin film electronic device
US5365034A · kind A · utility
52Cited by
3References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 24, 1993 |
| Grant date | Nov 15, 1994 |
| Priority date | — |
| Expiry date | Sep 24, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/136259
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A laser beam is irradiated and scanned on a substrate of a liquid crystal display device of an active matrix type. Pairs of electrons and holes caused by the known internal photoelectric effect are produced by irradiation of the laser beam to electrical conductive thin films including silicon layered on the substrate, and pass through a defective part of short circuit in an intersection of the plural electrical conductive thin films, and thereby a current flowing through the intersection increases and a position of the defect determined on the basis of the scanning position of the laser beam and the increase of the current.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.