Pressure transducers with diamond diaphragms and optical deflection detection means
US5365789A · kind A · utility
11Cited by
4References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 8, 1993 |
| Grant date | Nov 22, 1994 |
| Priority date | — |
| Expiry date | Jul 8, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0079
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure transducer comprises a polycrystalline diamond diaphragm (39), produced by use of a chemical vapour deposition technique, on a support (33). The diaphragm (39) can deflect in response to variations in pressure. A single optical fibre interferometer (36, 32) is used for detecting and measuring the deflection of the diaphragm (39) (FIG. 3).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.