Non-contact two position microeletronic cantilever switch
US5367136A · kind A · utility
68Cited by
6References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 26, 1993 |
| Grant date | Nov 22, 1994 |
| Priority date | — |
| Expiry date | Jul 26, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H59/0009
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A microelectrostatic cantilever switch that has a thin impermeable oxide layer on the surface of a contact pad which is engaged by an unsupported portion of a cantilever beam when the switch is in a closed position. The switch in the open position exhibits a capacitance between the cantilever beam and contact pad of 0.8 Pf and a capacitance of 0.001 to 0.01 Pf in the closed position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.