Electrostatic type micro transducer and control system using the same
US5367429A · kind A · utility
64Cited by
8References
38Claims
0Family size
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Key dates
| Filing date | Oct 16, 1992 |
| Grant date | Nov 22, 1994 |
| Priority date | — |
| Expiry date | Oct 16, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2059/0072
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electrostatic type micro accelerometer comprising means for preventing permanent sticking between a movable electrode and a stationary electrode due to residual dielectric polarization, resisual electric charges and water adsorption and condensation around possible contacting portions therebetween when the movable electrode excessively displaces. The sticking preventing means is realized by disposing one of electric field reducing means, water adsorption and condensation reducing means and contacting area limiting means around the possible contacting portions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.