Substrate transfer method
US5368437A · kind A · utility
1Cited by
5References
13Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 7, 1993 |
| Grant date | Nov 29, 1994 |
| Priority date | — |
| Expiry date | Jun 7, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67778
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of transferring a substrate between a stage for holding a substrate thereon and a conveying hand for conveying the substrate is disclosed. In one aspect, the method includes the steps of: moving the conveying hand having the substrate held thereon to a stage attraction starting position; starting attraction, through the stage, of the substrate held by the conveying hand; moving the conveying hand to a transfer position on a side of an attracting surface of the stage remote from the stage attraction starting position; and releasing the attraction of the substrate through the conveying hand.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.