Apparatus for solid surface analysis using X-ray spectroscopy
US5369275A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Jul 10, 1992 |
| Grant date | Nov 29, 1994 |
| Priority date | — |
| Expiry date | Jul 10, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N23/2208
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for solid surface analysis capable of carrying out the X-ray fluorescence analysis of the sample surface according to the characteristic X-rays detected by the energy dispersive X-ray detector. The apparatus can also obtain an enlarged image of the sample surface according to the secondary electrons emitted from the excited sample surface detected by the electron detector. The apparatus can also carry out an X-ray diffraction analysis of the sample surface according to diffracted X-rays detected by the diffracted X-ray detector. The apparatus is also capable of attaching or detaching the energy dispersive X-ray detector easily by incorporating a connection room which can be put in a vacuum state independent of the vacuum chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.