Scanning probe microscopy
US5371365A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 1, 1993 |
| Grant date | Dec 6, 1994 |
| Priority date | — |
| Expiry date | Feb 1, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/879
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There is provided a scanning probe microscopy comprising a probe 6 situated to face the surface of an sample 1, a first piezoelectric element 8 for moving the sample 1 and the probe 6 relative to each other in a first direction perpendicular to the surface of the sample, and second and third piezoelectric elements 3 and 4 for moving the probe and the sample relative to each other in second and third directions perpendicular to the first direction, thereby enabling the probe to scan the surface of the sample, wherein at least one of the first to third piezoelectric elements 8, 3 and 4, which is closest to the sample 1, is formed of a single crystal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.