Aerosol cleaning method
US5372652A · kind A · utility
36Cited by
7References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 14, 1993 |
| Grant date | Dec 13, 1994 |
| Priority date | — |
| Expiry date | Jun 14, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An aerosol cleaning apparatus for cleaning a substrate includes an aerosol producing means having a nozzle head. The nozzle head is positioned at a selected proximity and orientation to the substrate which is held by a rotatable holder. The aerosol spray dislodges particles from the substrate and the rotation of the substrate further assists in the removal of the loosened particles. A method of aerosol cleaning includes rotating a substrate at a preselected speed and spraying an aerosol jet in conjunction with the rotation to help in the removal of particles from the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.