Thin film resonator having stacked acoustic reflecting impedance matching layers and method
US5373268A · kind A · utility
70Cited by
15References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 1, 1993 |
| Grant date | Dec 13, 1994 |
| Priority date | — |
| Expiry date | Feb 1, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/175
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A frequency selective component and a method for making a frequency selective component. The frequency selective component includes a substrate having at least a first surface and an acoustic impedance transformer coupled to the substrate. The acoustic impedance transformer transforms an acoustic impedance of the substrate to a second acoustic impedance. The acoustic resonator further includes a mechanical resonator disposed on the acoustic impedance transformer. The acoustic resonator provides a frequency selection function.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.