Substrate for recording head, recording head and method for producing same
US5376231A · kind A · utility
57Cited by
11References
54Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 20, 1992 |
| Grant date | Dec 27, 1994 |
| Priority date | — |
| Expiry date | Apr 20, 2012 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2202/13
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A method for producing a substrate for a recording head wherein a plurality of electro-thermal converting elements, a plurality of driving functional elements for respectively driving the electro-thermal converting elements and a plurality of wiring electrodes for respectively connecting each of the driving functional elements and each of the electro-thermal converting elements are formed on a supporting member by photolithography comprises forming the wiring electrodes by etching a material layer for the wiring electrodes while etchingwise removing a photoresist for masking the material layer for the wiring electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.